Mulders, J.J.L. “Practical Precursor Aspects for Electron Beam Induced Deposition”. Nanofabrication 1, no. 1 (August 7, 2014): 74–79. Accessed September 21, 2024. https://ojs.bdtopten.com/33015.eaapublishing/index.php/nanofab/article/view/288.