Gierak, Jacques. “Focused Ion Beam Nano-Patterning from Traditional Applications to Single Ion Implantation Perspectives”. Nanofabrication 1, no. 1 (June 26, 2014): 35–52. Accessed December 23, 2024. https://ojs.bdtopten.com/33015.eaapublishing/index.php/nanofab/article/view/285.